Title:
基板搬送ロボット
Document Type and Number:
Japanese Patent JP5124677
Kind Code:
B2
Inventors:
Kenji Ago
Mitsunori Hayashi
Mitsunori Hayashi
Application Number:
JP2011181860A
Publication Date:
January 23, 2013
Filing Date:
August 23, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
B25J9/06; B25J15/00; B65G49/07; H01L21/677
Domestic Patent References:
| JP2000343475A | ||||
| JP62009881A | ||||
| JP3053604U | ||||
| JP4122589A | ||||
| JP2003266343A | ||||
| JP2000133692A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe