Title:
半導体光素子の製造方法
Document Type and Number:
Japanese Patent JP5151190
Kind Code:
B2
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Inventors:
Takahiko Kawahara
Application Number:
JP2007060546A
Publication Date:
February 27, 2013
Filing Date:
March 09, 2007
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01S5/042; H01S5/22
Domestic Patent References:
JP2000114664A | ||||
JP4291979A | ||||
JP2004281432A | ||||
JP2001168085A | ||||
JP4159788A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Masatoshi Shibata
Tosuke Yosuke
Shiro Terasaki
Masatoshi Shibata
Tosuke Yosuke