Title:
回折光学素子およびその製造方法
Document Type and Number:
Japanese Patent JP5180411
Kind Code:
B2
Abstract:
In a diffraction optical element having a structure in which a base and an optical adjustment layer adhere to each other, defects such as cracks and peeling occur in the optical adjustment layer, when the adhesive strength between the base and the optical adjustment layer is degraded. In a diffraction optical element 100 of the present invention, a plurality of anchor grooves 3 are formed in a planar second region 6 of a base 1. Further, a depth of an anchor groove of the plurality of anchor grooves 3, which is positioned on an outermost side, is designed so as to be smaller than a depth of another anchor groove of the plurality of anchor grooves 3, which is positioned on an innermost side. An optical adjustment layer 9 adheres so as to cover a first region 5 in which a diffraction grating 2 is formed and the second region 6 in which the anchor grooves 3 are formed of the base 1.
Inventors:
Tatsutoshi Suenaga
Yuka Okada
Akiko Murata
Yuka Okada
Akiko Murata
Application Number:
JP2012538102A
Publication Date:
April 10, 2013
Filing Date:
February 15, 2012
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
G02B5/18; G02B3/00; G02B3/08; G03B17/12
Domestic Patent References:
| JP2010102000A | 2010-05-06 | |||
| JPH07113907A | 1995-05-02 | |||
| JP2009053271A | 2009-03-12 |
Attorney, Agent or Firm:
Seiji Okuda
Osamu Kita
Michi Kajitani
Hidetaka Okabe
Akiko Miyake
Osamu Kita
Michi Kajitani
Hidetaka Okabe
Akiko Miyake