Title:
プローブユニット及び検査装置
Document Type and Number:
Japanese Patent JP5209215
Kind Code:
B2
Inventors:
Nakayama Yoshimi
Miura Kazuka
Miura Kazuka
Application Number:
JP2007008088A
Publication Date:
June 12, 2013
Filing Date:
January 17, 2007
Export Citation:
Assignee:
Nippon Micronics Co., Ltd.
International Classes:
G01R1/073; G01R1/06; G02F1/13; G02F1/1345
Domestic Patent References:
| JP2005274487A | ||||
| JP1108738A | ||||
| JP11352148A |
Attorney, Agent or Firm:
Nobuyuki Kudo
Previous Patent: 建材処理方法
Next Patent: METHOD FOR CONTROLLING TEMPERATURE IN ATMOSPHERIC HEAT TREATMENT FURNACE
Next Patent: METHOD FOR CONTROLLING TEMPERATURE IN ATMOSPHERIC HEAT TREATMENT FURNACE