Title:
スリットノズル洗浄装置及び塗布装置
Document Type and Number:
Japanese Patent JP5258811
Kind Code:
B2
Inventors:
Yukio Ogasawara
Fumihiro Miyazaki
Kimio Motoda
Fumihiro Miyazaki
Kimio Motoda
Application Number:
JP2010032446A
Publication Date:
August 07, 2013
Filing Date:
February 17, 2010
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B05C11/10; B05C5/02
Domestic Patent References:
| JP2007237122A | ||||
| JP2001113213A | ||||
| JP2008149247A | ||||
| JP2008268906A | ||||
| JP2002361149A | ||||
| JP2002177848A | ||||
| JP2008290031A |
Attorney, Agent or Firm:
Filial piety Sasaki