窒化アルミニウム焼結体 - Tokuyama Corporation

Title:

窒化アルミニウム焼結体

Document Type and Number:

Japanese Patent JP5265859

Kind Code:

B2

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Inventors:

Yuriko Kaito
Yukihiro Kinchika
Masanobu Higashi

Application Number:

JP2006239399A

Publication Date:

August 14, 2013

Filing Date:

September 04, 2006

Export Citation:

Assignee:

Tokuyama Corporation

International Classes:

C04B35/581; H01L23/15

Domestic Patent References:

Attorney, Agent or Firm:

Patent corporation ssinpat
Koji Makimura
Chihata Takahata
Toru Suzuki

Previous Patent: JPS5265858

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