Title:
半導体装置
Document Type and Number:
Japanese Patent JP5271982
Kind Code:
B2
Inventors:
Tetsuji Tagami
Takanori Hashizume
Takanori Hashizume
Application Number:
JP2010197003A
Publication Date:
August 21, 2013
Filing Date:
September 02, 2010
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L23/12; H01L21/52
Domestic Patent References:
| JP2005072515A | ||||
| JP2000340717A |
Attorney, Agent or Firm:
Yamato Tsutsui