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Title:
パターン検査装置及びパターン検査方法、パターン基板の製造方法
Document Type and Number:
Japanese Patent JP5278784
Kind Code:
B1
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Inventors:
Takehisa research
Takayuki Ishida
Haruhiko Kususe
Application Number:
JP2012192804A
Publication Date:
September 04, 2013
Filing Date:
September 03, 2012
Export Citation:
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Assignee:
Lasertec Co., Ltd.
International Classes:
G01N21/956
Domestic Patent References:
JP4701460B22011-06-15
JP2009162593A2009-07-23
JPH01153943A1989-06-16
JP2007101401A2007-04-19
Attorney, Agent or Firm:
Ken Ieiri
Kiyoshi Ogawa
Yasuhiro Iwase



 
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