Title:
基板処理システム、基板処理システムの表示方法及びそのプログラム
Document Type and Number:
Japanese Patent JP5281037
Kind Code:
B2
Inventors:
Yoshihiko Nakagawa
Application Number:
JP2010097831A
Publication Date:
September 04, 2013
Filing Date:
April 21, 2010
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
H01L21/02
Domestic Patent References:
| JP2004348605A |
Foreign References:
| WO2007102582A1 |
Attorney, Agent or Firm:
Patent Business Corporation IPS
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