Title:
インサート、トレイ及び電子部品試験装置
Document Type and Number:
Japanese Patent JP5291632
Kind Code:
B2
Inventors:
Akihiro Reibe
Application Number:
JP2009543596A
Publication Date:
September 18, 2013
Filing Date:
November 26, 2007
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01R31/26; H01L21/66; H01L21/67
Domestic Patent References:
| JPH08213794A | 1996-08-20 | |||
| JP2001033519A | 2001-02-09 |
Foreign References:
| WO2003075024A1 | 2003-09-12 |
Attorney, Agent or Firm:
Eternal patent business corporation