Title:
金属酸化物膜の製造方法、および積層体
Document Type and Number:
Japanese Patent JP5309462
Kind Code:
B2
Abstract:
To provide a method for producing a metal oxide film simply obtaining a metal oxide film in which crystallinity and a crystallized state of crystal structure are varied gradually or continuously.
The method for producing a metal oxide film comprises using two or more metal sources having the same metallic element and different nonmetallic parts and bringing a solution for forming a metal oxide film in which metal-source molar fractions of the two or more metal sources differ into contact with a substrate heated to a metal oxide film-forming temperature or higher while changing the metal-source molar fractions to thereby form a metal oxide film in which the crystal state is varied on the substrate.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
Hiroyuki Kobori
Masaho Yamazaki
Keisuke Nomura
Masaho Yamazaki
Keisuke Nomura
Application Number:
JP2007095165A
Publication Date:
October 09, 2013
Filing Date:
March 30, 2007
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
C01B13/34; C01F17/00; C01G9/02; C01G19/00; C01G19/02; C01G23/04; C01G25/02; C01G49/02; C01G51/04; C01G53/04; C03C17/25
Domestic Patent References:
| JP2003176130A | ||||
| JP1290507A | ||||
| JP2002145615A | ||||
| JP64059723A |
Attorney, Agent or Firm:
Akihiko Yamashita
Kishimoto Tatsuto
Kishimoto Tatsuto