Title:
表示用基板の欠陥検査方法及び欠陥検査装置並びに表示装置
Document Type and Number:
Japanese Patent JP5401761
Kind Code:
B2
Inventors:
Spring Mountain
古立 Study
古立 Study
Application Number:
JP2007054303A
Publication Date:
January 29, 2014
Filing Date:
March 05, 2007
Export Citation:
Assignee:
Sony Corp.
International Classes:
G09G3/30; G09F9/00; G09G3/20
Attorney, Agent or Firm:
Masaaki Yoshii