Title:
塗布液の塗布方法及び半導体装置の製造方法
Document Type and Number:
Japanese Patent JP5401763
Kind Code:
B2
Inventors:
Tomoaki Muramatsu
Nobuyuki Kubo
Kai -- former -- Yuko
Ichiro Omata
Nobuyuki Kubo
Kai -- former -- Yuko
Ichiro Omata
Application Number:
JP2007090868A
Publication Date:
January 29, 2014
Filing Date:
March 30, 2007
Export Citation:
Assignee:
FUJITSU semiconductor incorporated company
International Classes:
H01L21/027; B05D1/40
Attorney, Agent or Firm:
Mitsuharu Kawakami