Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
コート材除去装置及びコート材除去方法
Document Type and Number:
Japanese Patent JP5412230
Kind Code:
B2
More Like This:
JP2007078743PROTECTIVE FILM FORMING MATERIAL AND PHOTORESIST PATTERN FORMING METHOD USING THE SAME
JP2986146[Title of Invention] Recipe operation system for semiconductor manufacturing equipment
Inventors:
Tomohiro Funo
Application Number:
JP2009240688A
Publication Date:
February 12, 2014
Filing Date:
October 19, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L21/027; B08B3/04; G03F7/42; H01L21/304; H01L21/306
Domestic Patent References:
JP2001259502A
JP8078368A
JP2008021920A
Foreign References:
WO2009065757A1
Attorney, Agent or Firm:
Mutsumi Yanase
Atsushi Watanabe



 
Previous Patent: JPS5412229

Next Patent: RECORDING DEVICE FOR MAGNETIC BUBBLE INFORMATION