Title:
結晶成長装置
Document Type and Number:
Japanese Patent JP5423832
Kind Code:
B2
Inventors:
Hirokazu Iwata
Shoji Sarayama
Shoji Sarayama
Application Number:
JP2012098236A
Publication Date:
February 19, 2014
Filing Date:
April 23, 2012
Export Citation:
Assignee:
株式会社リコー
International Classes:
C30B9/06; C30B9/10; C30B29/38
Domestic Patent References:
| JP2003292400A |
Attorney, Agent or Firm:
Hiroaki Sakai
Previous Patent: JPS5423831
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