Title:
堆積膜形成装置および堆積膜形成方法
Document Type and Number:
Japanese Patent JP5430662
Kind Code:
B2
Abstract:
An apparatus for forming deposited film according to an aspect of the present invention includes: a chamber; a first electrode located in the chamber; and a second electrode located in the chamber with a predetermined spacing from the first electrode, the second electrode including a first supply part supplying a first material gas to a space between the first electrode and the second electrode, a plurality of second supply parts supplying a second material gas to the space, a first supply path connected to the first supply part, through which the first material gas is introduced, and a second supply path connected to the second supply parts, through which the second material gas is introduced, wherein: the second supply path includes a main part with a first inlet through which the second material gas is introduced, and a branch part including a plurality of gas flow paths with a second inlet through which the second material gas is introduced from the main part; a plurality of the second supply parts are connected to each of the plurality of gas flow paths of the branch part; and the main part and the branch part are structured so that the second material gas does not flow into the second supply parts from the first inlet as a straight flow.
Inventors:
Norikazu Ito
Shinichiro Inaba
Hiroshi Matsui
Shinichiro Inaba
Hiroshi Matsui
Application Number:
JP2011528891A
Publication Date:
March 05, 2014
Filing Date:
August 30, 2010
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L21/205; C23C16/455; C23C16/50
Domestic Patent References:
| JP2001345280A | 2001-12-14 | |||
| JP2003229369A | 2003-08-15 | |||
| JP2002080968A | 2002-03-22 | |||
| JP2003077897A | 2003-03-14 | |||
| JP2005123339A | 2005-05-12 | |||
| JPH11158633A | 1999-06-15 | |||
| JP2004149857A | 2004-05-27 | |||
| JP2005260186A | 2005-09-22 | |||
| JP2001345280A | 2001-12-14 | |||
| JP2003229369A | 2003-08-15 | |||
| JP2002080968A | 2002-03-22 | |||
| JP2003077897A | 2003-03-14 | |||
| JP2005123339A | 2005-05-12 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita