Title:
電子ビーム記録装置
Document Type and Number:
Japanese Patent JP5433011
Kind Code:
B2
Abstract:
PURPOSE To provide an electron beam recording apparatus capable of correcting rotational runout in an order of sub-nanometer with high precision. SOLUTION The apparatus comprises: a displacement detector comprising at least three displacement sensors arranged at different angles to each other in radial directions of the turntable so as to detect displacement in the radial direction of a rotational side surface of the turntable; a shape calculator to calculate shape data according to a roundness error of the turntable and an eccentricity component of the turntable; a memory to store the shape data; a rotational runout computing part to calculate rotational runout of the turntable that does not include an eccentricity component according to detected displacement from the displacement sensor when the turntable rotates and the shape data; and a beam irradiating position adjuster to adjust an irradiating position of the electron beam according to the rotational runout.
Inventors:
Hiroaki Kitahara
Application Number:
JP2011532877A
Publication Date:
March 05, 2014
Filing Date:
September 28, 2009
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
G11B7/26; G03F7/20; G11B5/84; H01L21/027
Domestic Patent References:
| JP2010072180A | 2010-04-02 | |||
| JP2007242184A | 2007-09-20 | |||
| JP2004079056A | 2004-03-11 | |||
| JP2003317285A | 2003-11-07 | |||
| JP2002342988A | 2002-11-29 | |||
| JP2010072180A | 2010-04-02 | |||
| JP2007242184A | 2007-09-20 | |||
| JP2004079056A | 2004-03-11 | |||
| JP2003317285A | 2003-11-07 | |||
| JP2002342988A | 2002-11-29 |
Foreign References:
| WO2007111260A1 | 2007-10-04 | |||
| WO2007111260A1 | 2007-10-04 |
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Mitsuyuki Matsuyama
Akira Sudo
Mitsuyuki Matsuyama