Title:
ロータリー式ピックアップ機構及びそれを備えた半導体処理装置
Document Type and Number:
Japanese Patent JP5448096
Kind Code:
B2
Inventors:
Ryoichi Irita
Application Number:
JP2010267931A
Publication Date:
March 19, 2014
Filing Date:
November 30, 2010
Export Citation:
Assignee:
Ueno Seiki Co., Ltd.
International Classes:
H01L21/67
Domestic Patent References:
| JP4372139A | ||||
| JP3090868U | ||||
| JP2001024394A | ||||
| JP2007134537A |
Attorney, Agent or Firm:
Kiuchi Mitsuharu