Title:
蛍光X線分析装置及び蛍光X線分析方法
Document Type and Number:
Japanese Patent JP5481321
Kind Code:
B2
Abstract:
The X-ray fluorescence analyzer (100) includes: an enclosure (10); a door (20) for putting the sample into and out of the enclosure; a height measurement mechanism (7) capable of measuring a height at the irradiation point; a moving mechanism control unit (9) for adjusting a distance between the sample and the radiation source as well as the X-ray detector based on the measured height at the irradiation point; a laser unit (7) for irradiating the irradiation point with a visible light laser beam; a laser start control unit (9) for irradiating the visible light laser beam by the laser unit (7) when the door is open state; and a height measurement mechanism start control unit (9) for starting the height measurement mechanism to measure the height at the irradiation point when the door is opened.
Inventors:
Kiyoshi Hasegawa
Yutaka Ichinomiya
Hideki Takiguchi
Yutaka Ichinomiya
Hideki Takiguchi
Application Number:
JP2010193167A
Publication Date:
April 23, 2014
Filing Date:
August 31, 2010
Export Citation:
Assignee:
Hitachi High-Tech Science Co., Ltd.
International Classes:
G01N23/223
Domestic Patent References:
| JP2010071969A | ||||
| JP2006329944A | ||||
| JP2004184314A | ||||
| JP2005083976A | ||||
| JP2002048740A | ||||
| JP2011047898A |
Attorney, Agent or Firm:
Kenichiro Akao
Akira Shimoda
Kazuhiko Kurihara
Akira Shimoda
Kazuhiko Kurihara