Title:
CVD装置
Document Type and Number:
Japanese Patent JP5498291
Kind Code:
B2
Inventors:
Oikawa Kira
Atsushi Abe
Mikitaka Ito
Toshimi Kominato
Atsushi Abe
Mikitaka Ito
Toshimi Kominato
Application Number:
JP2010162148A
Publication Date:
May 21, 2014
Filing Date:
July 16, 2010
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
H01L21/31; C23C16/44
Domestic Patent References:
| JP2000054137A |
Attorney, Agent or Firm:
Patent Business Corporation Tani/Abe Patent Office
Atsuhiro Hamanaka
Nakanishi Eiichi
Atsuhiro Hamanaka
Nakanishi Eiichi
Previous Patent: JPS5498290
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