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Title:
振動デバイス
Document Type and Number:
Japanese Patent JP5531699
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vibrating device capable of preventing vibration leakage while stably fixing, to a package, a vibrator including a vibration arm flexurally vibrating in an out-of-plane direction.SOLUTION: This vibrating device 1 includes: a vibrator 2 including a base portion 27 and a plurality of vibration arms 28, 29, 30 extending in a Y-axis direction from the base portion 27, arranged side by side in an X-axis direction orthogonal to the Y-axis direction, and each flexurally vibrating in a Z-axis direction orthogonal to the Y-axis direction and the X-axis direction; a package 3 for storing the vibrator 2 therein; and a fixing member 5 including a fixation portion 51 partially fixed to the vibrator 2 for partially fixing the vibrator 2 to the package 3; wherein the fixation portion 51 is located on a line segment L passing through the center of gravity G of the vibrator 2 and extending in the Y-axis direction or in the vicinity thereof when viewed from the Z-axis direction.

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Inventors:
Takashi Yamazaki
Takeo Funagawa
Application Number:
JP2010065016A
Publication Date:
June 25, 2014
Filing Date:
March 19, 2010
Export Citation:
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Assignee:
Seiko Epson Corporation
International Classes:
H03H9/19; H01L41/09; H01L41/18; H01L41/187; H03H9/215
Domestic Patent References:
JP56014711A
JP2009171118A
JP58053215A
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi