Title:
パターン形成方法、化学増幅型レジスト組成物、及び、レジスト膜
Document Type and Number:
Japanese Patent JP5560115
Kind Code:
B2
Inventors:
Stone door Scent
Shohei Kataoka
Shohei Kataoka
Application Number:
JP2010146787A
Publication Date:
July 23, 2014
Filing Date:
June 28, 2010
Export Citation:
Assignee:
Fuji Photo Film Co., Ltd.
International Classes:
G03F7/039; G03F7/038; G03F7/32; H01L21/027
Attorney, Agent or Firm:
Takamatsu 猛
Toshiyuki Ozawa
Hiromichi Hasegawa
Toshiyuki Ozawa
Hiromichi Hasegawa
Previous Patent: JPS5560114
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