Title:
ＳｉＣのＰＶＴ結晶成長方法
Document Type and Number:
Japanese Patent JP5577095
Kind Code:
B2
Inventors:
Gupta, アヴィナッシュ
Chakravarti, Hutt Pal, Kay
A chain, ジホン
セメナス, Edward
Wu, a pin
Chakravarti, Hutt Pal, Kay
A chain, ジホン
セメナス, Edward
Wu, a pin
Application Number:
JP2009530596A
Publication Date:
August 20, 2014
Filing Date:
September 27, 2007
Export Citation:
Assignee:
Two Six, Incorporated
International Classes:
C30B29/36; C30B23/06
Attorney, Agent or Firm:
Shuichiro Kitamura
Tetsuya Yamazaki
East Kunihiko
Tetsuya Yamazaki
East Kunihiko