Title:
半導体素子
Document Type and Number:
Japanese Patent JP5580872
Kind Code:
B2
Inventors:
Miyoshi Real person
Yoshitaka Kuraoka
Yoshitaka Kuraoka
Application Number:
JP2012273005A
Publication Date:
August 27, 2014
Filing Date:
December 14, 2012
Export Citation:
Assignee:
NGK Insulators, Ltd.
International Classes:
H01L29/868; H01L21/28; H01L29/06; H01L29/47; H01L29/861; H01L29/872
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita