Title:
鏡面研磨装置、その加圧ヘッド及び鏡面研磨方法
Document Type and Number:
Japanese Patent JP5603338
Kind Code:
B2
Abstract:
A polisher, a pressure plate (20) of the polisher, and a method of polishing are disclosed. The pressure plate (20) includes a main body, an air bag (50) mounted to one surface of the main body to adjust a pressure applied from the main body to a polishing object, and a pad (16b) having a ring shape, mounted along a circumference of the one surface of the main body.
Inventors:
Kim, Hong Gil
Min, pan Gyi
Min, pan Gyi
Application Number:
JP2011532026A
Publication Date:
October 08, 2014
Filing Date:
October 21, 2009
Export Citation:
Assignee:
Elgey Schild Ron, Incorporated
International Classes:
B24B37/30; B24B37/005; B24B37/04; B24B37/07; H01L21/304
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa