Title:
大型ペリクル用枠体、及び大型ペリクル
Document Type and Number:
Japanese Patent JP5619436
Kind Code:
B2
Inventors:
北島 慎太郎
Application Number:
JP2010053520A
Publication Date:
November 05, 2014
Filing Date:
March 10, 2010
Export Citation:
Assignee:
旭化成イーマテリアルズ株式会社
International Classes:
H01L21/027; G03F1/64
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Nishimoto
Koichi Osaka
Kido 博兒
Ikeda Masato
Yoshinori Shimizu
Hiroyuki Nishimoto
Koichi Osaka
Kido 博兒
Ikeda Masato