Title:
微小電気機械システム
Document Type and Number:
Japanese Patent JP5619824
Kind Code:
B2
Abstract:
In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+Ã 1 ) occurs in the beam 4a and a compressive stress (-Ã 2 ) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.
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Inventors:
出川 宗里
鄭 希元
鄭 希元
Application Number:
JP2012150843A
Publication Date:
November 05, 2014
Filing Date:
July 04, 2012
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01C19/5762; G01C19/5733; G01P15/125
Attorney, Agent or Firm:
Tsutsui Daiwa