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Title:
ICタグ及びその製造方法
Document Type and Number:
Japanese Patent JP5629999
Kind Code:
B2
Abstract:

To provide a thin-film integrated circuit device capable of forming an IC tag that does not cause design of a commodity to deteriorate.

A thin-film integrated circuit device 10A has at least a TFT element A, a capacitive element B and/or a resistive element C on a transparent substrate 1. A gate electrode 2A, a gate insulating film 3A, a semiconductor film 4, a source electrode 6S, and a drain electrode 6D which constitute the TFT element A are all transparent films. A dielectric film 3B, constituting the capacitive element C includes the same material as that of the gate insulating film 3A. One first electrode 2B sandwiching the dielectric film 3B in lamination direction Z includes the same material as the gate electrode 2A. The other second electrode 6B includes the same material as the source electrode 6S and the drain electrode 6D. A resistor film 4C constituting the resistive element C comprises the same material as the semiconductor film 4. A third electrode 6E and a fourth electrode 6F sandwiching the resistor film 4C in the in-plane direction X includes the same material as those of the source electrode 6S and the drain electrode 6F.

COPYRIGHT: (C)2011,JPO&INPIT


Inventors:
後藤 大介
Application Number:
JP2009224288A
Publication Date:
November 26, 2014
Filing Date:
September 29, 2009
Export Citation:
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Assignee:
大日本印刷株式会社
International Classes:
H01L29/786; G06K19/07; G06K19/077; H01L21/822; H01L27/04
Attorney, Agent or Firm:
Toshikazu Yoshimura



 
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