Title:
圧電素子およびその製造方法
Document Type and Number:
Japanese Patent JP5635319
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of reducing the defective rate in a manufacturing process of a product utilizing a piezoelectric element and also relaxing the stress inside of the piezoelectric element during driving and a method of manufacturing the same.SOLUTION: A piezoelectric element 100 in which piezoelectric layers 110 and internal electrodes are alternately stacked and which expands and contracts by applying a voltage includes a plurality of stress relaxation layers 150 that relax the stress caused by driving and are formed in contact with an outer periphery on a series of cross-sections vertical to a stacking direction Z around an active region 145 where projections of the internal electrodes in the stacking direction Z overlap. The length of each of the stress relaxation layers 150 along the outer periphery is shorter than the length of one side of the outer periphery. With this configuration, the stress relaxation layers 150 can reduce the stress applied in the piezoelectric element 100 when stress is generated by expansion and contraction of the piezoelectric element 100, and thus the destruction of the piezoelectric element 100 can be prevented. In addition, as the length of each of the stress relaxation layers 150 is shorter than that of one side of the outer periphery, the stress relaxation layers 150 do not cause the destruction and defects hardly occur.
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Inventors:
阿隅 一将
熊本 憲二
熊本 憲二
Application Number:
JP2010163191A
Publication Date:
December 03, 2014
Filing Date:
July 20, 2010
Export Citation:
Assignee:
太平洋セメント株式会社
株式会社日本セラテック
株式会社日本セラテック
International Classes:
H01L41/083; H01L41/187; H01L41/22; H01L41/273; H01L41/297; H01L41/314; H01L41/39
Attorney, Agent or Firm:
Fukuchi Takeo
Yoichi Shirakawa
Yoichi Shirakawa