Title:
露光装置及びホログラムのデータの生成方法
Document Type and Number:
Japanese Patent JP5654010
Kind Code:
B2
Abstract:
The present invention provides a hologram which forms a light intensity distribution on a predetermined plane by using an incident light. The hologram includes a plurality of cells configured to control both a phase of a first polarized light component of the incident light and a phase of a second polarized light component. The plurality of cells are designed to form a portion in an overlap region in which a first light intensity distribution region formed on the predetermined plane by the first polarized light component and a second light intensity distribution region formed on the predetermined plane by the second polarized light component are superposed on each other. The phase of the first polarized light component is diffused in the portion formed in the overlap region.
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Inventors:
松原 功
吽野 靖行
ダラス, ウィリアム
吽野 靖行
ダラス, ウィリアム
Application Number:
JP2012517711A
Publication Date:
January 14, 2015
Filing Date:
June 24, 2010
Export Citation:
Assignee:
キヤノン株式会社
アリゾナ ボード オブ リージェンツ オン ビハーフ オブ ザ ユニバーシティー オブ アリゾナArizona Board of Regents on behalf of the University of Arizona
アリゾナ ボード オブ リージェンツ オン ビハーフ オブ ザ ユニバーシティー オブ アリゾナArizona Board of Regents on behalf of the University of Arizona
International Classes:
G03H1/22; G02B5/32
Attorney, Agent or Firm:
Yasunari Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Hideji Kimura
Shimoyama 治
Yukimitsu Nagagawa
Shiro Takayanagi
Yasuhiro Otsuka
Hideji Kimura
Shimoyama 治
Yukimitsu Nagagawa