Title:
高圧モジュール
Document Type and Number:
Japanese Patent JP5696628
Kind Code:
B2
Inventors:
Hirotaka Kaomote
Tetsumi Takano
Tetsumi Takano
Application Number:
JP2011203513A
Publication Date:
April 08, 2015
Filing Date:
September 16, 2011
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L23/62; G01R31/12; H01L23/12; H01L25/07; H01L25/18
Domestic Patent References:
JP2001332823A | ||||
JP2008034707A | ||||
JP2000234993A |
Attorney, Agent or Firm:
Yoichi Matsumoto