酸化物焼結体、ターゲット、およびそれを用いて得られる透明導電膜、並びに透明導電性基材

Japanese Patent JP5716768

B2

Provided are an oxide sintered body having zinc oxide as a main component and still more containing magnesium, a target obtained by processing the same, a transparent conductive film having excellent chemical resistance and low resistance, obtained by a direct-current sputtering method or an ion plating method by using the same, and a transparent conductive substrate. Provided are an oxide sintered body having zinc oxide and magnesium, wherein the content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Mg); still more, an oxide sintered body having zinc oxide, magnesium, gallium and/or aluminum, wherein the content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+A1)/(Zn+Ga+Al), and the content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+ Ga+Al+Mg); a target obtained by processing these oxide sintered bodies; and a transparent conductive film formed on a substrate by a sputtering method or an ion plating method, by using this target.

Tokugyo Nakayama
Nohyuki Abe

JP2013026303A

May 13, 2015

February 14, 2013

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Sumitomo Metal Mining Co., Ltd.

C04B35/453; C23C14/34

JP2005306684A

HWANG,Deuk-Kyu et al.,Effects of deposition temperature on the properties of Zn1-xMgxO thin films,Applied Surface Science,ELSEVIER,2004年,Vol.225, pp.217-222
Xiao-Liang Xu et al.,Photoluminescence and structure properties of Zn1-xMgxO films grown by RF magnetron sputtering,Journal of Physics. Condensed Matter,Journal of Physics, Condensed Matter,英国,Institute of Physics Publishing,2006年 1月 9日,Vol.18,1189-1196

Kenji Kawabi

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