Title:
メタルマスク材料及びメタルマスク
Document Type and Number:
Japanese Patent JP5721691
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a metal mask material suitable as a metal mask excellent in etching property, used in manufacturing an organic EL display and the like, and to provide a metal mask.SOLUTION: A metal mask material is Fe-Ni-based alloy containing Ni and Co of total 30 to 45 mass%, Co of 0 to 6 mass% and the balance Fe with inevitable impurities and satisfies the relationship of the formula 1:I/{I+I+I+I}≤40%, the formula 2:I/{I+I+I+I}≤25%, the formula 3:{I+I}/{I+I+I+I}≤90% where X ray diffraction intensities of crystal orientation (111), (200), (220), (311) are I, I, Iand Irespectively.
Inventors:
Ikuya Kurosaki
Application Number:
JP2012253848A
Publication Date:
May 20, 2015
Filing Date:
November 20, 2012
Export Citation:
Assignee:
jx Nippon Mining & Metals Co., Ltd.
International Classes:
C22C38/00; C21D9/46
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Attorney, Agent or Firm:
Kenichiro Akao
Akira Shimoda
Kazuhiko Kurihara
Akira Shimoda
Kazuhiko Kurihara