Title:
感放射線性樹脂組成物及びそれにより形成されるレジスト被膜
Document Type and Number:
Japanese Patent JP5724798
Kind Code:
B2
Abstract:
A radiation-sensitive resin composition that includes (A) a polymer that includes a repeating unit (a1) and a fluorine atom, the repeating unit (a1) including a group shown by the following formula (1) or (2), the radiation-sensitive resin composition including the polymer (A) in an amount of 0.1 mass % or more and less than 20 mass % based on the total amount of polymers included in the radiation-sensitive resin composition.
Inventors:
Toru Kimura
Hiromitsu Nakajima
Kimura Reiko
Kazuki Kazuki
Masashi Hori
Masashi Yoshida
Hiromitsu Nakajima
Kimura Reiko
Kazuki Kazuki
Masashi Hori
Masashi Yoshida
Application Number:
JP2011214135A
Publication Date:
May 27, 2015
Filing Date:
September 29, 2011
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/039; G03F7/004
Domestic Patent References:
| JP2010237627A | ||||
| JP2010122579A | ||||
| JP2003055408A | ||||
| JP2011178988A | ||||
| JP2002088124A |
Attorney, Agent or Firm:
Tsuyoshi Yamada
Miho Hirota
Satoru Ando
Kyoko Hino
Miho Hirota
Satoru Ando
Kyoko Hino