Title:
熱式流量計
Document Type and Number:
Japanese Patent JP5743871
Kind Code:
B2
Abstract:
In order to provide a thermal-type flowmeter highly accurate, with high reliability, and simple in construction, while being available at a lower price, a thermal-type flowmeter as proposed includes a sub-path that takes in a fluid under measurement; a sensor element that measures a flow-rate of the fluid under measurement in the sub-path; a temperature detection element that detects a temperature of the fluid under measurement; a drive circuit that controls a heating temperature of the sensor element; and a protection circuit that protects the drive circuit from noise, a cavity being formed on a substrate of the sensor element, an exothermic resistor being provided on a thin-film part on the cavity through the intermediary of an electrically insulating film, and a flow rate being detected on the basis of temperature distribution in the thin-film part.
Inventors:
Noboru Tokuyasu
Shinobu Tashiro
Keiji Hanzawa
Morino Takeshi
Ryosuke Doi
Shinobu Tashiro
Keiji Hanzawa
Morino Takeshi
Ryosuke Doi
Application Number:
JP2011267451A
Publication Date:
July 01, 2015
Filing Date:
December 07, 2011
Export Citation:
Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01F1/684
Domestic Patent References:
| JP2011122984A | ||||
| JP200958230A | ||||
| JP116752A | ||||
| JP200598795A | ||||
| JP200820193A |
Foreign References:
| WO2002010694A1 |
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki