Title:
密閉型デバイス
Document Type and Number:
Japanese Patent JP5749510
Kind Code:
B2
More Like This:
Inventors:
Ai Tanaka
Atsushi Kira
Shinya Saito
Fuwa Tillage
Atsushi Kira
Shinya Saito
Fuwa Tillage
Application Number:
JP2011026312A
Publication Date:
July 15, 2015
Filing Date:
February 09, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01M3/00
Domestic Patent References:
| JP2010071816A | ||||
| JP2008209284A | ||||
| JP62501931A | ||||
| JP4038047U | ||||
| JP3137252U | ||||
| JP2007171042A | ||||
| JP2006053106A | ||||
| JP2009222693A |
Foreign References:
| US20110061449 | ||||
| WO2008082362A1 | ||||
| US5597957 | ||||
| US20070234782 | ||||
| US6608490 |
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki