Title:
研磨パッド
Document Type and Number:
Japanese Patent JP5755528
Kind Code:
B2
Inventors:
Amiyama Hitomi
Ryohei Awai
Ryohei Awai
Application Number:
JP2011174513A
Publication Date:
July 29, 2015
Filing Date:
August 10, 2011
Export Citation:
Assignee:
Nitta Haas Co., Ltd.
International Classes:
B24B37/26; H01L21/304
Domestic Patent References:
| JP2006156876A | ||||
| JP8216029A | ||||
| JP2000061817A | ||||
| JP2004167605A | ||||
| JP2002154050A |
Foreign References:
| US6692338 |
Attorney, Agent or Firm:
Kazuhide Okada