Title:
エッチング方法及びエッチング装置
Document Type and Number:
Japanese Patent JP5762915
Kind Code:
B2
Inventors:
Masanori Akiyama
Tatsuhiko Matsuo
Tatsuhiko Matsuo
Application Number:
JP2011224093A
Publication Date:
August 12, 2015
Filing Date:
October 11, 2011
Export Citation:
Assignee:
Chemtron Co., Ltd.
International Classes:
C23F1/08; H05K3/06
Domestic Patent References:
| JP9143760A | ||||
| JP2002256458A | ||||
| JP2010287881A | ||||
| JP2008034436A | ||||
| JP2001123282A | ||||
| JP2004095616A | ||||
| JP2004158801A | ||||
| JP2009059777A |
Foreign References:
| WO2011120509A1 |
Attorney, Agent or Firm:
Naoshi Yoneyama