Title:
配線基板およびそれを用いたプローブカード
Document Type and Number:
Japanese Patent JP5797548
Kind Code:
B2
Inventors:
Takayuki Taguchi
Kenji Terada
Kenji Terada
Application Number:
JP2011289308A
Publication Date:
October 21, 2015
Filing Date:
December 28, 2011
Export Citation:
Assignee:
Kyocera Circuit Solutions Co., Ltd.
International Classes:
H05K1/02; G01R1/073; H01L21/66
Domestic Patent References:
| JP8335752A | ||||
| JP2005235997A | ||||
| JP2010156594A |