Title:
感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法
Document Type and Number:
Japanese Patent JP5799799
Kind Code:
B2
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Inventors:
Miyasaka Masahiro
Blacksmith Makoto
Indie
Ginger Gamamatsu
Lee Bao
Blacksmith Makoto
Indie
Ginger Gamamatsu
Lee Bao
Application Number:
JP2011283988A
Publication Date:
October 28, 2015
Filing Date:
December 26, 2011
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/031; C08F2/50; G03F7/004; G03F7/033; H05K3/00; H05K3/06
Domestic Patent References:
| JP2011525480A | ||||
| JP2011524436A | ||||
| JP2009519991A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Hirano
Yoshinori Shimizu
Hiroyuki Hirano