Title:
塩及びレジスト組成物
Document Type and Number:
Japanese Patent JP5810550
Kind Code:
B2
More Like This:
Inventors:
Koji Ichikawa
Hiroshi Sakamoto
Hiroshi Sakamoto
Application Number:
JP2011038145A
Publication Date:
November 11, 2015
Filing Date:
February 24, 2011
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07C309/58; C07C381/12; C08F212/14; C09K3/00; G03F7/004; G03F7/039
Domestic Patent References:
| JP2011118310A | ||||
| JP2011175253A | ||||
| JP2011168698A | ||||
| JP2010116550A | ||||
| JP2010077404A | ||||
| JP2011157313A | ||||
| JP2011164345A |
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto
Toru Sakamoto