Title:
動作範囲を拡張させた質量流量制御器
Document Type and Number:
Japanese Patent JP5812089
Kind Code:
B2
Abstract:
A mass flow controller among other embodiments and method is described. The mass flow controller including a thermal mass flow sensor including at least two sensing elements coupled to a sensor tube of the mass flow controller, the thermal mass flow sensor being designed to provide a first signal indicative of flow of a gas within a first flow-rate-range and a second signal indicative of flow of the gas within a second flow-rate-range; and a control portion figured to control a valve position of the mass flow controller responsive to the first signal when the flow of the gas is within the first flow-rate-range and control the valve position of the mass flow controller responsive to the second signal when the flow of the gas is within a second flow-rate-range.
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Inventors:
Zoroc, Jay Michael
Smirnov, V. Alexey
Smirnov, V. Alexey
Application Number:
JP2013503229A
Publication Date:
November 11, 2015
Filing Date:
April 08, 2011
Export Citation:
Assignee:
Hitachi Metals Co., Ltd.
International Classes:
G01F1/696; G01F1/00; G05D7/06
Domestic Patent References:
| JP2004109111A | ||||
| JP2001142541A |
Foreign References:
| US20080211510 |
Attorney, Agent or Firm:
Seiji Ohno
Koji Morita
Kenichi Katayama
Koji Morita
Kenichi Katayama