Title:
走査電子顕微鏡
Document Type and Number:
Japanese Patent JP5814741
Kind Code:
B2
Abstract:
To provide a scanning electron microscope that can detect reflected electrons of any emission angle, the scanning electron microscope, which obtains an image by detecting electrons from a sample (19) has: a control electrode (18) that discriminates between secondary electrons from the sample (19) and reflected electrons; a secondary electron conversion electrode (13) that generates secondary electrons by the impact of reflected electrons; a withdrawing electrode (12) that withdraws those secondary electrons; an energy filter (11) that discriminates between the secondary electrons withdrawn and electrons reflected from the sample (19); and a control calculation means (36) that selects a combination of voltages applied to the secondary electron conversion electrode (13), the withdrawing electrode (12), and energy filter (11).
Inventors:
Nobuhiro Okai
Yasunari Hayada
Fukaya Ritsuo
Shigo Wang
Yasunari Hayada
Fukaya Ritsuo
Shigo Wang
Application Number:
JP2011230221A
Publication Date:
November 17, 2015
Filing Date:
October 20, 2011
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/244; H01J37/22; H01J37/28
Domestic Patent References:
| JP63102148A | ||||
| JP2003157790A | ||||
| JP9171791A |
Foreign References:
| WO2000019482A1 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation