Title:
振動素子、振動子、電子デバイス、及び電子機器
Document Type and Number:
Japanese Patent JP5824967
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a compact high-frequency piezoelectric vibration element that has a small CI value and suppresses nearby spurious frequencies while using a fundamental wave.SOLUTION: A piezoelectric vibration element 1 includes: a piezoelectric substrate 10 that has a rectangular vibration region 12 and a support portion 13; excitation electrodes 25a and 25b; and lead electrodes 27a and 27b. The support portion 13 includes a first support portion 14, a second support portion 15, a third support portion 16, and a fourth support portion. The second support portion 15 has a second inclined portion 15b and a second support portion main body 15a. The second support portion 15 is provided with at least one slit 20.
Inventors:
Osamu Ishii
Shiro Murakami
Shiro Murakami
Application Number:
JP2011182245A
Publication Date:
December 02, 2015
Filing Date:
August 24, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H03H9/19; H01L41/09; H01L41/18; H01L41/22; H01L41/23; H01L41/311; H01L41/332; H03B5/32
Domestic Patent References:
| JP2002374146A | ||||
| JP2009246583A | ||||
| JP2005033293A | ||||
| JP2011109681A | ||||
| JP2007300416A | ||||
| JP2011041113A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa