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Title:
輪郭成形基板を含む崩壊モードで動作可能なcMUT
Document Type and Number:
Japanese Patent JP5833312
Kind Code:
B2
Abstract:
A capacitive ultrasound transducer capable of operation in collapsed mode either with a reduced bias voltage, or with no bias voltage, is provided. The transducer includes a substrate that is contoured so that a middle region of the flexible membrane is collapsed against the substrate in the absence of a bias voltage. A non-collapsible gap may exists between the substrate and peripheral regions of the flexible membrane. The contour of the substrate may be such as to strain the flexible membrane past the point of collapse, or to mechanically interfere with the flexible membrane. The substrate may include a further membrane disposed beneath the flexible membrane, the further membrane being contoured so that the flexible membrane is collapsed against it. The substrate may a support disposed beneath the further membrane to deflect a corresponding portion of the further membrane upward toward the flexible membrane. The support may be a post. The transducer may be operated in collapse mode with an improved efficiency (k2eff) as compared to otherwise similar conventional transducers exhibiting comparably uncontoured substrates. A related medical imaging system is provided, which may include an array of such transducers disposed on a common substrate. A method of operating such a transducer is provided that includes operating the transducer in the collapse mode in the absence of a bias voltage.

Inventors:
Petrzzello john
Fraser John Douglas
Butterfly seaway
Dufort Benowa
Letavik Theodor James
Application Number:
JP2010537594A
Publication Date:
December 16, 2015
Filing Date:
December 12, 2008
Export Citation:
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Assignee:
KONINKLIJKE PHILIPS N.V.
International Classes:
B06B1/06; A61B8/00; H04R17/00
Other References:
米国特許出願公開第2006/0004289号明細書
特開2005-321257号公報
Attorney, Agent or Firm:
Susumu Tsugaru
Fueda Shusen
Takahiro Igarashi