Title:
荷電粒子ビーム描画方法
Document Type and Number:
Japanese Patent JP5833401
Kind Code:
B2
Inventors:
Yamamura Hikaru
Kenichi Kamishiro
Kenichi Kamishiro
Application Number:
JP2011216825A
Publication Date:
December 16, 2015
Filing Date:
September 30, 2011
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2009158776A | ||||
| JP3104208A | ||||
| JP2007043078A | ||||
| JP1111327A | ||||
| JP3150835A | ||||
| JP2003332203A | ||||
| JP2009064862A |
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Mitsuyuki Matsuyama
Akira Sudo
Mitsuyuki Matsuyama