Title:
自動外観検査装置
Document Type and Number:
Japanese Patent JP5854501
Kind Code:
B2
Inventors:
Kenji Okubo
Hisa Yamamoto
Hisa Yamamoto
Application Number:
JP2011251203A
Publication Date:
February 09, 2016
Filing Date:
November 17, 2011
Export Citation:
Assignee:
Toray Engineering Co., Ltd.
International Classes:
G01N21/956; H01L21/66
Domestic Patent References:
| JP2004117290A | ||||
| JP11183124A | ||||
| JP6160054A | ||||
| JP2010151666A | ||||
| JP6102196A | ||||
| JP2010239041A | ||||
| JP2006162462A | ||||
| JP2003262508A | ||||
| JP10122828A | ||||
| JP2008185532A |
Foreign References:
| WO2007126027A1 |