Title:
シードレーザモード安定化のためのシステムおよび方法
Document Type and Number:
Japanese Patent JP5878267
Kind Code:
B2
Abstract:
A method and apparatus for stabilizing the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed. In one embodiment, the cavity length of the laser may be adjusted by means of a movable mirror forming one end of the cavity. The time delay from the release of an output pulse to the lasing threshold next being reached is measured at different mirror positions, and a mirror position selected which results in a cavity mode being aligned with the gain peak of the laser, thus producing a minimum time delay from an output pulse of the laser to the next lasing threshold. A Q-switch in the laser allows for pre-lasing and thus jitter-free timing of output pulses. Feedback loops keep the laser output at maximum gain and efficiency, and the attenuation and timing at a desired operating point.
Inventors:
Sandtrom Richard El
Application Number:
JP2015531098A
Publication Date:
March 08, 2016
Filing Date:
August 13, 2013
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01S3/139; H01S3/115; H01S3/117
Foreign References:
| US20090296749 | ||||
| US20110139760 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki