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Title:
ポリイミドフィルムの検査方法、これを用いたポリイミドフィルムの製造方法、及びポリイミドフィルム製造装置
Document Type and Number:
Japanese Patent JP5881610
Kind Code:
B2
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Inventors:
Yousuke Ono
Application Number:
JP2012540683A
Publication Date:
March 09, 2016
Filing Date:
October 26, 2011
Export Citation:
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Assignee:
Mitsui Chemicals, Inc.
International Classes:
G01N25/16; G01N21/21
Domestic Patent References:
JP2007079548A2007-03-29
Foreign References:
WO2007046228A12007-04-26
Attorney, Agent or Firm:
Koichi Washida



 
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