Title:
露光装置、基板処理装置、基板の露光方法および基板処理方法
Document Type and Number:
Japanese Patent JP5890255
Kind Code:
B2
Inventors:
Kazuhiro Nishimura
Akihiko Morita
Yukihiko Inagaki
Akihiko Morita
Yukihiko Inagaki
Application Number:
JP2012127368A
Publication Date:
March 22, 2016
Filing Date:
June 04, 2012
Export Citation:
Assignee:
Screen Semiconductor Solutions Co., Ltd.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2004261801A | ||||
| JP2010250177A | ||||
| JP2005197348A | ||||
| JP2009135169A |
Attorney, Agent or Firm:
Yoshito Fukushima